Adaptive control system for improvement of contrast in interferograms

Nicolás Veloz, Jesús González-Laprea, Rafael Escalona

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Resumen

The present work consists on the development of an adaptive control system to compensate the reduction of the contrast in interferograms caused by mechanical vibrations present in a Mirau based interference microscopy system. The control generates random signals that are injected during the integration time of the camera through a piezoelectric device in order to change the phase of the interferometer. Each obtained image has different control signals injected during the integration time. The contrast is evaluated and if the contrast is improved, the signal injected is adjusted to seek for a better improvement. The best signals collected are added to the control signal, which is applied to the system after the adaptation process is over. The control scheme implemented is capable of finding signals to compensate the main frequency noisy components of the system.

Idioma originalInglés
Título de la publicación alojadaDimensional Optical Metrology and Inspection for Practical Applications II
DOI
EstadoPublicada - 2013
Publicado de forma externa
Evento2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications - San Diego, CA, Estados Unidos
Duración: 25 ago. 201326 ago. 2013

Serie de la publicación

NombreProceedings of SPIE - The International Society for Optical Engineering
Volumen8839
ISSN (versión impresa)0277-786X
ISSN (versión digital)1996-756X

Conferencia

Conferencia2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications
País/TerritorioEstados Unidos
CiudadSan Diego, CA
Período25/08/1326/08/13

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