Adaptive control system for improvement of contrast in interferograms

Nicolás Veloz, Jesús González-Laprea, Rafael Escalona

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The present work consists on the development of an adaptive control system to compensate the reduction of the contrast in interferograms caused by mechanical vibrations present in a Mirau based interference microscopy system. The control generates random signals that are injected during the integration time of the camera through a piezoelectric device in order to change the phase of the interferometer. Each obtained image has different control signals injected during the integration time. The contrast is evaluated and if the contrast is improved, the signal injected is adjusted to seek for a better improvement. The best signals collected are added to the control signal, which is applied to the system after the adaptation process is over. The control scheme implemented is capable of finding signals to compensate the main frequency noisy components of the system.

Original languageEnglish
Title of host publicationDimensional Optical Metrology and Inspection for Practical Applications II
DOIs
StatePublished - 2013
Externally publishedYes
Event2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications - San Diego, CA, United States
Duration: 25 Aug 201326 Aug 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8839
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2013 Conference on Dimensional Optical Metrology and Inspection for Practical Applications
Country/TerritoryUnited States
CitySan Diego, CA
Period25/08/1326/08/13

Keywords

  • Adaptive control
  • Contrast
  • Interferogram
  • Opto-electronic control
  • Vibration

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